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US 12,484,429 B2Granted
Organic vapor jet printing system
AssigneeUniversal Display Corporation
InventorsGregory McGraw, William E. Quinn, Gregg Kottas, Matthew King, Benjamin Swedlove, Tomasz Trojacki
Life of this patent
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Abstract
Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
Claims17
A device for deposition of a material onto a substrate, the device comprising:
- a nozzle block comprising a first depositor comprising:
- a leading first rank comprising:
- a leading portion of a first exhaust aperture;
- a leading portion of a second exhaust aperture;
- and
- a first delivery aperture disposed between the leading portion of the first exhaust aperture and the leading portion of the second exhaust aperture;
- wherein a shortest distance from the first delivery aperture to the leading portion of the first exhaust aperture is less than a shortest distance from the first delivery aperture to the leading portion of the second exhaust aperture;
- a trailing second rank comprising:
- a trailing portion of the first exhaust aperture;
- a trailing portion of the second exhaust aperture;
- and
- a second delivery aperture disposed between the trailing portion of the first exhaust aperture and the trailing portion of the second exhaust aperture;
- wherein a shortest distance from the second delivery aperture to the trailing portion of the second exhaust aperture is less than a shortest distance from the second delivery aperture to the trailing portion of the first exhaust aperture;
- wherein the leading portion of the first exhaust aperture is separated from the trailing portion of the first exhaust aperture by a portion of the nozzle block;
- and
- wherein the leading portion of the second exhaust aperture is separated from the trailing portion of the second exhaust aperture by a portion of the nozzle block.
13 more elements
Dependencies are inferred from the claim text.