Memory device and method of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Wei Jiang, Pin-Cheng Hsu, Feng-Cheng Yang, Chung-Te Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYu-Wei Jiang, Pin-Cheng Hsu, Feng-Cheng Yang, Chung-Te Lin
Estimating the term…
A memory device includes a multi-layer stack, a channel layer, a memory material layer and at least three conductive pillars. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer and memory material layer penetrate through the plurality of conductive layers and the plurality of dielectric layers. The at least three conductive pillars are surrounded by the channel layer and the memory material layer, wherein the at least three conductive pillars are electrically connected to conductive layers respectively. The at least three conductive pillars includes a first, a second and a third conductive pillars disposed between the first conductive pillar and the second conductive pillar. A third width of the third conductive pillar is smaller than a first width of the first conductive pillar and a second width of the second conductive pillar.
A memory device, comprising:
A memory device, comprising:
A memory device, comprising:
Dependencies are inferred from the claim text.