Acoustic wave device with tilted multilayer interdigital transducer electrode

A multilayer piezoelectric substrate surface acoustic wave device comprising:

• a multilayer piezoelectric substrate;
• and
• an interdigital transducer electrode over the multilayer piezoelectric-layer substrate, the interdigital transducer electrode including a first layer and a second layer over the first layer, the interdigital transducer electrode having a negative tilt angle and a non-zero rotation angle, the negative tilt angle configured to suppress spurious responses, the acoustic wave device being configured to generate a surface acoustic wave having a wavelength L, the interdigital transducer electrode includes a first bus bar, a second bus bar, a first set of fingers extending from the first bus bar, and a second set of fingers extending from the second bus bar, wherein a width between a finger to an adjacent finger is in a range between 20 L to 40 L.

An acoustic wave device comprising:

• a multilayer piezoelectric substrate;
• and
• an interdigital transducer electrode over the multilayer piezoelectric substrate, the interdigital transducer electrode including a first layer and a second layer over the first layer, the first layer being more dense than the second layer, the interdigital transducer electrode having a non-zero rotation angle and a negative tilt angle, the acoustic wave device being configured to generate a surface acoustic wave having a wavelength L, the first layer having a thickness less than 0.05 L and the second layer having a thickness in a range between 0.03 L and 0.1 L, the interdigital transducer electrode includes a first bus bar, a second bus bar, a first set of fingers extending from the first bus bar, and a second set of fingers extending from the second bus bar, wherein a width between a finger to an adjacent finger is in a range between 20 L to 40 L.