Phase shifter and method for preparing phase shifter
AssigneeBeijing BOE Technology Development Co., Ltd.
InventorsJianyun Zhao, Jingwen Guo, Chunxin Li, Qianhong Wu, Jianxing Liu, Zibo Cao, Feng Qu
Life of this patent
Estimating the term…
Abstract
A phase shifter and a method for preparing a phase shifter are provided. The phase shifter includes at least one phase shifter unit. The phase shifter unit includes a substrate; a first lead and a second lead on the substrate and spaced apart from each other; a bridging section on the first lead and the second lead, wherein the bridging section is connected to the first lead and the second lead; and a third lead on a side of the bridging section away from the substrate.
Claims14
A phase shifter comprising at least one phase shifter unit, wherein the phase shifter unit comprises:
- a substrate;
- a first lead and a second lead on the substrate and spaced apart from each other;
- a bridging section on the first lead and the second lead, wherein the bridging section is connected to the first lead and the second lead;
- and
- a third lead on a side of the bridging section away from the substrate, wherein the phase shifter unit further comprises an isolation layer which covers at least a surface of the third lead facing towards the substrate,
- wherein the bridging section comprises a bridge structure disposed opposite to the substrate, a first anchoring section connecting the bridge structure to the first lead and a second anchoring section connecting the bridge structure to the second lead,
- wherein the bridge structure comprises a middle portion, a first portion extending from the middle portion toward the first anchoring section and a second portion extending from the middle portion toward the second anchoring section, and wherein a projection of the middle portion on the substrate overlaps with a projection of the third lead on the substrate,
- wherein a width of the middle portion satisfies at least one of the following:
- the width of the middle portion is greater than a width of the first portion, and the width of the middle portion is greater than a width of the second portion,
- wherein the phase shifter unit further comprises:
- a support on a surface of the substrate provided with the first lead and the second lead, and wherein a projection of the support on the substrate overlaps with a projection of the bridge structure on the substrate,
- wherein the support comprises at least two sub-supports, and wherein the at least two sub-supports are on different sides of the middle portion of the bridging section in an extension direction of the bridging section.
A method for preparing a phase shifter, comprising forming at least one phase shifter unit, wherein forming the at least one phase shifter unit comprises:
- forming a first lead and a second lead spaced apart from each other on a substrate;
- forming a bridging section on the first lead and the second lead, wherein the bridging section connects the first lead and the second lead;
- forming a third lead on a side of the bridging section away from the substrate;
- forming an isolation layer covering at least a surface of the third lead facing towards the substrate, wherein the bridging section comprises a bridge structure disposed opposite to the substrate, a first anchoring section connecting the bridge structure to the first lead and a second anchoring section connecting the bridge structure to the second lead, the bridge structure comprising a middle portion, a first portion extending from the middle portion to the first anchoring section, and a second portion extending from the middle portion to the second anchoring section, wherein a projection of the middle portion on the substrate overlaps with a projection of the third lead on the substrate, wherein the middle portion having a width satisfying at least one of the following:
- the width of the middle portion is greater than a width of the first portion, and the width of the middle portion is greater than a width of the second portion;
- and
- forming, before forming a first sacrificial layer, a support between the first lead and the second lead, wherein a projection of the support on the substrate overlaps with a projection of the bridge structure on the substrate, wherein the support comprises at least two sub-supports, and wherein the at least two sub-supports are on different sides of the middle portion of the bridging section in an extension direction of the bridging section.
Dependencies are inferred from the claim text.