# US 12,482,709 B2 · Fast beam calibration procedure for beamline ion implanter > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,482,709 B2 - Document ID: US12482709B2 - Status: Granted - Kind: B2 - Application number: 17/700,048 - Filed: 2022-03-21 - Published: 2023-02-23 - Granted: 2025-11-25 - Earliest claimed: 2021-08-20 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: George M. Gammel; Eric Donald Wilson - Web page: https://patentgrep.com/patent/US12482709B2 ## CPC - H01J 37/3171: {for ion implantation} - H10P 74/20: characterised by the properties tested or measured, e.g. structural or electrical properties - H01J 37/1474: {Scanning means} - H01J 37/304: Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals - H01J 2237/24542: Beam profile - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A method includes receiving a spot beam profile is received for a spot ion beam; receiving a linear scanned beam profile for the spot ion beam; generating a calculated calibration spot profile, based upon the spot beam profile and the linear scanned beam profile; and implementing an adjusted scanned profile for the spot ion beam, based upon the calculated calibration spot profile. ## Claims ### Claim 1 A method, comprising: receiving a spot beam profile for a spot ion beam; receiving a linear scanned beam profile for the spot ion beam; generating a calculated calibration spot profile, based upon the spot beam profile and the linear scanned beam profile; and implementing an adjusted scanned profile for the spot ion beam, based upon the calculated calibration spot profile, wherein the adjusted scanned profile is obtained by: generating, based on the calculated calibration spot profile, a scanned waveform for the spot ion beam with scan speed adjustments to vary scan speed along a horizontal beam scan axis; measuring, with a mechanical profile detector, beam current density of the scanned waveform along the horizontal beam scan axis; and determining the measured beam current density to be below a beam current uniformity specification limit. ### Claim 2 (depends on 1) The method of claim 1, the generating the calculated calibration spot profile comprising generating a fattened spot beam profile by performing a convolution operation upon the spot beam profile. ### Claim 3 (depends on 2) The method of claim 2, the generating the calculated calibration spot profile further comprising generating a delayed fattened spot beam profile by adjusting the fattened spot beam profile by a dose controller delay of a controller used to control the spot ion beam. ### Claim 4 (depends on 3) The method of claim 3, the generating the calculated calibration spot profile further comprising applying an area scalar to the delayed fattened spot beam profile, to generate an area scaled delayed fattened spot beam profile, where the area scalar is determined from a ratio of an ideal calibration spot beam profile to an area of the linear scanned beam profile. ### Claim 5 (depends on 4) The method of claim 4, the generating the calculated calibration spot profile further comprising applying a profiler Speed Transient Response factor to the area scaled delayed fattened spot beam profile, based upon a filter response for a detector filter used to generate the linear scanned beam profile. ### Claim 6 (depends on 1) The method of claim 1, wherein the spot beam profile is measured by scanning a current detector across an undeflected stationary spot beam. ### Claim 7 (depends on 1) The method of claim 1, wherein the linear scanned beam profile is generated by scanning the spot ion beam across a predetermined horizontal scan distance at a constant velocity. ### Claim 8 An apparatus for controlling scanning of an ion beam, comprising: a beam scanner to scan a spot ion beam with respect to a substrate; a detector, to measure current of the spot ion beam; and a beam calibration component, comprising a controller and a memory, the memory comprising a calibration routine, operative on the controller to receive a spot beam profile for the spot ion beam; receive a linear scanned beam profile of the spot ion beam; generate a calculated calibration spot profile, based upon the spot beam profile and the linear scanned beam profile; and implement an adjusted scanned profile for the spot ion beam, based upon the calculated calibration spot profile, wherein the adjusted scanned profile is obtained by: generating, based on the calculated calibration spot profile, a scanned waveform for the spot ion beam with scan speed adjustments to vary scan speed along a horizontal beam scan axis; measuring, with a mechanical profile detector, beam current density of the scanned waveform along the horizontal beam scan axis; and determining the measured beam current density to be below a beam current uniformity specification limit. ### Claim 9 (depends on 8) The apparatus of claim 8, the calibration routine, operative on the controller to generate the calculated calibration spot profile by generating a fattened spot beam profile by performing a convolution operation upon the spot beam profile. ### Claim 10 (depends on 9) The apparatus of claim 9, the calibration routine, operative on the controller to generate the calculated calibration spot profile by further generating a delayed fattened spot beam profile by adjusting the fattened spot beam profile by a dose controller delay of a dose controller used to control the spot ion beam. ### Claim 11 (depends on 10) The apparatus of claim 10, the calibration routine, operative on the controller to generate the calculated calibration spot profile by further applying an area scalar to the delayed fattened spot beam profile, to generate an area scaled delayed fattened spot beam profile, where the area scalar is determined from a ratio of an ideal calibration spot beam profile to an area of the linear scanned beam profile. ### Claim 12 (depends on 11) The apparatus of claim 11, the calibration routine, operative on the controller to generate the calculated calibration spot profile by further applying a profiler Speed Transient Response factor to the area scaled delayed fattened spot beam profile, based upon a filter response for a detector filter used to generate the linear scanned beam profile. ### Claim 13 (depends on 9) The apparatus of claim 9, wherein the spot beam profile is measured by scanning a current detector across an undeflected stationary spot beam. ### Claim 14 (depends on 9) The apparatus of claim 9, wherein the linear scanned beam profile is generated by scanning the spot ion beam across a predetermined horizontal scan distance at a constant velocity. ### Claim 15 A non-transitory computer-readable storage medium including instructions that when executed by a computer, cause the computer to: receive a spot beam profile for a spot ion beam; receive a linear scanned beam profile of the spot ion beam; generate a calculated calibration spot profile, based upon the spot beam profile and the linear scanned beam profile; and implement an adjusted scanned profile for the spot ion beam, based upon the calculated calibration spot profile, wherein the adjusted scanned profile is obtained by: generating, based on the calculated calibration spot profile, a scanned waveform for the spot ion beam with scan speed adjustments to vary scan speed along a horizontal beam scan axis; measuring, with a mechanical profile detector, beam current density of the scanned waveform along the horizontal beam scan axis; and determining the measured beam current density to be below a beam current uniformity specification limit. ### Claim 16 (depends on 15) The non-transitory computer-readable storage medium of claim 15, wherein the instructions further configure the computer to generate the calculated calibration spot profile by generating a fattened spot beam profile by performing a convolution operation upon the spot beam profile. ### Claim 17 (depends on 16) The non-transitory computer-readable storage medium of claim 16, wherein the instructions further configure the computer to generate the calculated calibration spot profile by further generating a delayed fattened spot beam profile by adjusting the fattened spot beam profile by a dose controller delay of a dose controller used to control the spot ion beam. ### Claim 18 (depends on 17) The non-transitory computer-readable storage medium of claim 17, wherein the instructions further configure the computer to generate the calculated calibration spot profile by further applying an area scalar to the delayed fattened spot beam profile, to generate an area scaled delayed fattened spot beam profile, where the area scalar is determined from a ratio of an ideal calibration spot beam profile to an area of the linear scanned beam profile. ### Claim 19 (depends on 18) The non-transitory computer-readable storage medium of claim 18, wherein the instructions further configure the computer to generate the calculated calibration spot profile by further applying a profiler Speed Transient Response factor to the area scaled delayed fattened spot beam profile, based upon a filter response for a detector filter used to generate the linear scanned beam profile.