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US 12,482,669 B2Granted
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
AssigneeKioxia Corporation
InventorTakashi Watanabe
Life of this patent
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Abstract
A semiconductor manufacturing apparatus is a semiconductor manufacturing apparatus for holding a polishing object on a polishing head and polishing a surface of the polishing object. The semiconductor manufacturing apparatus includes a plurality of laser irradiation parts on the polishing head. At least one of the laser irradiation parts is a laser irradiation part configured to radiate a laser beam toward the back surface side of the polishing object.
Claims15
A semiconductor manufacturing apparatus comprising:
- a polishing head configured to hold a polishing object having a first surface and a second surface, the first surface being a surface to be polished, the second surface being opposite to the first surface, the polishing head having a lower surface facing the second surface, the lower surface having a central portion and an outer circumferential portion, and the polishing head having a plurality of laser irradiation units incorporated in the polishing head in a region from the central portion to the outer circumferential portion,
- wherein at least one of the plurality of laser irradiation units is configured to irradiate a laser beam to the second surface of the polishing object.
Dependencies are inferred from the claim text.