Multiple charged particle beam writing apparatus, multiple charged particle beam writing method, and computer readable recording media storing program

A multiple charged particle beam writing method comprising:

• dividing each stripe region of a plurality of stripe regions obtained by dividing a writing region of a target object by a size of a first direction of a beam array region of multiple charged particle beams on a surface of the target object in the first direction into a plurality of mesh regions in the first direction and in a second direction that is a movement direction of a stage along the each stripe region;
• calculating, for each divided mesh region, a representative value of a plurality of doses of a plurality of beams with which an inside of the mesh region is irradiated as a dose representative value;
• performing a calculation process of a rising temperature given to a mesh region of interest being one of the plurality of mesh regions by heat due to beam irradiation to each of the plurality of mesh regions in a processing region corresponding to the beam array region, the calculation process including a calculation process being a convolution process using the dose representative value for each of the plurality of mesh regions and a thermal spread function representing thermal spread generated by the plurality of mesh regions;
• performing a repetitive process of repeating the calculation process while shifting a position in the second direction on the stripe region and calculating, as an effective temperature of the mesh region of interest, a representative value of a plurality of the rising temperatures obtained by performing the repetitive process a plurality of times until the mesh region of interest reaches, from one end of the processing region in the second direction, the other end;
• correcting, using the effective temperature, doses of a plurality of beams with which each mesh region of interest is irradiated;
• and
• writing a pattern on the target object using the multiple charged particle beams having respective corrected doses.

A non-transitory computer readable recording media storing a program to make a computer execute, the program comprising:

• dividing each stripe region of a plurality of stripe regions obtained by dividing a writing region of a target object by a size of a first direction of a beam array region of multiple charged particle beams on a surface of the target object in the first direction into a plurality of mesh regions in the first direction and in a second direction that is a movement direction of a stage along the each stripe region;
• calculating, for each divided mesh region, a representative value of a plurality of doses of a plurality of beams with which an inside of the mesh region is irradiated as a dose representative value;
• performing a calculation process of a rising temperature given to a mesh region of interest being one of the plurality of mesh regions by heat due to beam irradiation to each of the plurality of mesh regions in a processing region corresponding to the beam array region, the calculation process including a calculation process being a convolution process using the dose representative value for each of the plurality of mesh regions and a thermal spread function representing thermal spread generated by the plurality of mesh regions;
• performing a repetitive process of repeating the calculation process while shifting a position in the second direction on the stripe region and calculating, as an effective temperature of the mesh region of interest, a representative value of a plurality of the rising temperatures obtained by performing the repetitive process a plurality of times until the mesh region of interest reaches, from one end of the processing region in the second direction, the other end;
• and
• correcting, using the effective temperature, doses of a plurality of beams with which each mesh region of interest is irradiated.