Illumination optical system, exposure apparatus, irradiation method, and component manufacturing method
AssigneeUshio Denki Kabushiki Kaisha
InventorsOsamu Osawa, Koichi Ito
Life of this patent
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Abstract
An illumination optical system that irradiates a target object with light from a light source unit includes an integrator optical system, a condenser lens, and a bandpass filter. The integrator optical system is disposed on an optical path of the light emitted from the light source unit and uniformizes an illuminance distribution of the light with which the target object is to be irradiated. The condenser lens includes a plurality of lenses and irradiates the target object with the light emitted from the integrator optical system. The bandpass filter is disposed between any two of the plurality of lenses included in the condenser lens.
Claims15
An illumination optical system that irradiates a target object with light from a light source unit, comprising:
- an integrator optical system that is disposed on an optical path of the light emitted from the light source unit and uniformizes an illuminance distribution of the light with which the target object is to be irradiated;
- a condenser lens that includes a plurality of lenses and irradiates the target object with the light emitted from the integrator optical system;
- and
- a bandpass filter that is disposed between any two of the plurality of lenses included in the condenser lens.
An irradiation method of irradiating a target object with light, comprising:
- emitting light from a light source unit;
- emitting, by an integrator optical system disposed on an optical path of the light emitted from the light source unit, the light toward a condenser lens including a plurality of lenses, in a manner that an illuminance distribution of the light with which the target object is to be irradiated is uniformized;
- and
- irradiating, by the condenser lens, the target object with light passing through a bandpass filter disposed between any two of the plurality of lenses.
Dependencies are inferred from the claim text.