All-reflective microscopy

Abstract

Devices, systems and methods related to all-reflective microscopes are described. The microscopes include an all-reflective off-axis optical system and is characterized with substantially zero chromatic aberration, low group delay dispersion and no central obscuration. One reflective microscope configuration includes a reflective objective subsection with at least three mirrors, where at least one mirror is off-axis and non-spherical. The reflective microscope also includes a reflective relay subsection with at least two minors having freeform surfaces and positioned to receive light from the reflective objective subsection. The reflective relay subsystem is configured to produce a magnification to allow coupling of light between two planes having differing beam sizes. The reflective microscope further includes an imaging subsection with at least one mirror having a freeform surface and positioned to receive light from the reflective relay subsection and to direct light received thereon in reflection in a direction of a sensor.

Dependencies are inferred from the claim text.