Physical quantity sensor and inertial measurement unit

A physical quantity sensor that, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, detects a physical quantity in the third direction, the physical quantity sensor comprising:

• a fixed portion fixed to a substrate;
• a support beam having one end coupled to the fixed portion and provided along the second direction;
• a movable body coupled to the other end of the support beam;
• a first fixed electrode group provided at the substrate and arranged in the first direction of the support beam;
• and
• a second fixed electrode group provided at the substrate and arranged in the first direction of the support beam,
• wherein the movable body includes:
• a first coupling portion coupled to the other end of the support beam and extending from the support beam in the first direction;
• a first base portion coupled to the first coupling portion and provided along the second direction;
• a first movable electrode group provided at the first base portion and facing the first fixed electrode group in the second direction;
• a second coupling portion coupled to the other end of the support beam and extending from the support beam in the first direction;
• a second base portion coupled to the second coupling portion and provided along the second direction;
• and
• a second movable electrode group provided at the second base portion and facing the second fixed electrode group in the second direction,
• wherein hm=hr, where hm is a height of a gravity center position of the movable body in the third direction hr is a height of a rotation center of the support beam in the third direction, and
• hm1>hr>hm2, where hm1 is a height of a gravity center position of the first movable electrode group in the third direction and hm2 is a height of a gravity center position of the second movable electrode group in the third direction.