Drift-free humidity sensor and calibration method thereof
AssigneeSensylink Microelectronics Inc.
InventorGuangjun Yu
Life of this patent
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Abstract
A drift-free humidity sensor and a calibration method thereof are provided. The drift-free humidity sensor includes a first humidity sensor unit and a second humidity sensor unit. The first humidity sensor unit includes a first measuring electrode, and a first humidity sensitive material is covered onto the first measuring electrode. The second humidity sensor unit includes a second measuring electrode, and a second humidity sensitive material is covered onto the second measuring electrode. The first humidity sensor unit and the second humidity sensor unit have different maximum humidity drifts. The drift-free humidity sensor effectively solves the drift problem of ordinary capacitive or resistive humidity sensors.
Claims20
A drift-free humidity sensor, comprising a first humidity sensor unit, a second humidity sensor unit, and an analysis and processing unit, wherein the analysis and processing unit is a processor or is part of a processor;
- the first humidity sensor unit comprises a first measuring electrode and a first humidity sensitive material covering the first measuring electrode;
- the second humidity sensor unit comprises a second measuring electrode and a second humidity sensitive material covering the second measuring electrode;
- the first humidity sensor unit and the second humidity sensor unit have different maximum humidity drifts;
- and the analysis and processing unit is configured to calibrate and output measurement values of the first humidity sensor unit and the second humidity sensor unit.
Dependencies are inferred from the claim text.