Multi-wavelength ozone concentration sensor and method of use
AssigneeMKS Inc.
InventorsHeinrich Johannes Seiwert, Felix Groitl, Christiane Le Tiec, Ulrich Alfred Brammer
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AssigneeMKS Inc.
InventorsHeinrich Johannes Seiwert, Felix Groitl, Christiane Le Tiec, Ulrich Alfred Brammer
Estimating the term…
The present application discloses an apparatus for measuring the concentration of ozone within a fluid and includes a conduit defining at least one passage therein, the conduit has at least one reflective coating selective applied thereto and defining one or more transmission regions on the conduit, a multi-wavelength light source system having at least one light source configured to direct at least one optical signal having a first wavelength through an ozonated fluid within the conduit and at least one UV light source configured to direct at least one UV optical signal having a second wavelength band through the ozonated fluid wherein the optical signal and the UV optical signal traverse through the conduit along different optical paths via at least one reflection from the reflective coating applied to the conduit, and at least one detector positioned proximate to the transmission regions formed on the conduit and configured to detect the optical signal and the UV signal thereby permitting measurement of the concentration of ozone within an ozonated fluid.
An apparatus for measuring a concentration of ozone within a fluid, comprising:
A method of measuring a concentration of ozone within a fluid, comprising:
An apparatus for measuring a concentration of ozone within a fluid, comprising:
Dependencies are inferred from the claim text.