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US 12,480,025 B2Granted
Composition
AssigneeDenka Company Limited
InventorsTometomo Uchida, Toru Arai, Takashi Domoto, Takako Tanigawa, Jun Watanabe, Megumi Sudo, Jun Yoshida
Life of this patent
Estimating the term…
Abstract
A composition for temporary bonding, includes: (A) a (meth)acrylate having the following (A-1) and (A-2): (A-1) a monofunctional (meth)acrylate whose side chain is an alkyl group having 18 or more carbon atoms and homopolymer has a Tg of −100° C. to 60° C., and (A-2) a polyfunctional (meth)acrylate; (B) a polyisobutene homopolymer and/or a polyisobutene copolymer; and (C) a photo radical polymerization initiator.
Claims1
A method for producing a semiconductor wafer, the method comprising the steps of:
- applying an adhesive for temporary bonding to a semiconductor wafer substrate and/or a support member to bond the semiconductor wafer substrate and the support member;
- curing the adhesive for temporary bonding by irradiating light having a wavelength of 350 nm to 700 nm to obtain a bonded body,
- wherein the cured adhesive satisfies all the following conditions:
- in a light transmittance of a film of the cured adhesive having a thickness of 50 μm, a light transmittance in a wavelength region of 395 nm or more among the wavelengths of a light source used for curing is 70% or more,
- in a light transmittance of a film of the cured adhesive having a thickness of 50 μm, a light transmittance in a wavelength region of 385 nm or more and less than 395 nm among the wavelengths of a light source used for curing is 20% or more, and
- in a light transmittance of a film of the cured adhesive having a thickness of 50 μm, a light transmittance at a wavelength of 355 nm of UV laser is 1% or less;
- and
- irradiating the bonded body with laser light having a wavelength of less than 385 nm to release the semiconductor wafer substrate, wherein
- the cured adhesive for temporary bonding constitutes a single layer in the bonded body.
6 more elements
Dependencies are inferred from the claim text.