Processing machine, measuring device, and method for manufacturing object to be processed

A processing machine comprising:

• a first drive source configured to make a workpiece and a tool relatively move in a first direction;
• a second drive source configured to make the workpiece and the tool relatively move in a second direction perpendicular to the first direction;
• a first sensor configured to detect relative positions of the workpiece and the tool in the first direction;
• a camera configured to acquire an image capturing the tool in the first direction, the camera being arranged at a position at which it relatively moves relative to the tool in the first direction along with the relative movements of the workpiece and the tool in the first direction and acquires a plurality of images which are different from each other in relative positions relative to the tool in the first direction;
• an image processing device configured to:
• identify a position of the tool in the first direction based on a clarity of the tool in the image,
• identify a position of the tool in the second direction based on a position of the tool in the image acquired by the camera,
• identify a first relative position of the workpiece and the tool in the first direction at which the clarity of the tool becomes the highest based on the plurality of images and the relative positions of the workpiece and the tool in the first direction which are detected by the first sensor when acquiring the plurality of images, and
• identify a first amount of deviation between the identified first relative position and a previously acquired relative position of the workpiece and the tool in the first direction at a time when the camera is focused on the tool;
• and
• a control device configured to:
• control the first drive source based on the position of the tool in the first direction identified by the image processing device,
• perform feedback control of the first drive source based on detection values of the first sensor,
• control the second drive source based on the position of the tool in the second direction identified by the image processing device, and
• correct the feedback control of the first drive source based on the detection values of the first sensor based on the first amount of deviation.

A processing machine comprising:

• a first drive source configured to make a workpiece and a tool relatively move in a first direction;
• a second drive source configured to make the workpiece and the tool relatively move in a second direction perpendicular to the first direction;
• a camera configured to acquire an image capturing the tool in the first direction, the camera being arranged at a position at which it relatively moves relative to the tool in the first direction along with the relative movements of the workpiece and the tool in the first direction and acquires a plurality of images which are different from each other in relative positions relative to the tool in the first direction;
• a first sensor configured to detect relative positions of the workpiece and the tool in the first direction;
• a second sensor configured to detect relative positions of the workpiece and the tool in the second direction;
• an image processing device configured to:
• identify a position of the tool in the first direction based on a clarity of the tool in the image,
• identify a position of the tool in the second direction based on a position of the tool in the image acquired by the camera,
• identify a first relative position of the workpiece and the tool in the first direction at which the clarity of the tool becomes the highest based on the plurality of images and the relative positions of the workpiece and the tool in the first direction which are detected by the first sensor when acquiring the plurality of images,
• identify a first amount of deviation between the identified first relative position and a previously acquired relative position of the workpiece and the tool in the first direction at a time when the camera is focused on the tool, and
• identify a second amount of deviation between a position of the tool in the second direction at a first timing and a position of the tool in the second direction at a second timing after the first timing based on a position of the tool in the second direction in an image acquired at the first timing and a position of the tool in the second direction in an image acquired at the second timing;
• and
• a control device configured to:
• control the first drive source based on the position of the tool in the first direction identified by the image processing device,
• control the second drive source based on the position of the tool in the second direction identified by the image processing device,
• perform feedback control of the first drive source based on detection values of the first sensor,
• perform feedback control of the second drive source based on detection values of the second sensor,
• correct the feedback control of the first drive source based on the detection value of the first sensor based on the first amount of deviation, and
• correct the feedback control of the second drive source based on the detection value of the second sensor based on the second amount of deviation.