Two-port acoustic wave sensor device
AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche, Julien Garcia, Emilie Courjon
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AssigneeSoitec
InventorsSylvain Ballandras, Thierry LaRoche, Julien Garcia, Emilie Courjon
Estimating the term…
An acoustic wave sensor device comprises a quartz material layer surface; arranged along a first axis, a first interdigitated transducer disposed over the planar surface of the quartz material layer, a first reflection structure disposed over the planar surface of the quartz material layer, and a second reflection structure disposed over the planar surface of the quartz material layer; and arranged along a second axis, a second interdigitated transducer disposed over the planar surface of the quartz material layer, a third reflection structure disposed over the planar surface of the quartz material layer, and a fourth reflection structure disposed over the planar surface of the quartz material layer; and wherein the first axis and the second axis are inclined to each other by a finite angle.
An acoustic wave sensor device, comprising:
Dependencies are inferred from the claim text.