Acoustic wave device with multi-layer substrate including ceramic
AssigneeSkyworks Solutions, Inc.
InventorsHironori Fukuhara, Rei Goto, Keiichi Maki
Life of this patent
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Abstract
An acoustic wave device is disclosed. The acoustic wave device includes a support layer, a ceramic layer positioned over the support layer, a piezoelectric layer positioned over the ceramic layer, and an interdigital transducer electrode positioned over the piezoelectric layer. The support layer has a higher thermal conductivity than the ceramic layer. The ceramic layer can be a polycrystalline spinel layer. The acoustic wave device can be a surface acoustic wave device configured to generate a surface acoustic wave.
Claims20
An acoustic wave device comprising:
- a support substrate;
- a ceramic layer over the support substrate, the ceramic layer having a thickness that is at least equal to or greater than a wavelength λ of an acoustic wave generated by the acoustic wave device, the ceramic layer configured to scatter back reflections to suppress one or more spurious modes in the acoustic wave device and the support substrate having a higher thermal conductivity than the ceramic layer;
- a piezoelectric layer over the ceramic layer;
- and
- at least a first interdigital transducer electrode over the piezoelectric layer.
A method of manufacturing an acoustic wave device, the method comprising:
- forming a ceramic layer to scatter back reflections to suppress one or more spurious modes in the acoustic wave device;
- attaching a support substrate to a ceramic layer, the ceramic layer having a thickness that is at least equal to or greater than a wavelength λ of an acoustic wave generated by the acoustic wave device, and the support substrate having a higher thermal conductivity than the ceramic layer;
- bonding a piezoelectric layer to a surface of the ceramic layer such that the piezoelectric layer and the support substrate are on opposing sides of the ceramic layer;
- and
- forming at least a first interdigital transducer electrode over the piezoelectric layer.
Dependencies are inferred from the claim text.