Isolator
AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorsKenichi Ootsuka, Mari Ootsuka
Life of this patent
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Abstract
According to one embodiment, an isolator includes a first electrode, a second electrode, a conductive body, and a first insulating layer. The second electrode is provided on the first electrode and separated from the first electrode. The conductive body is provided around the first and second electrodes along a first plane perpendicular to a first direction. The first direction is from the first electrode toward the second electrode. The first insulating layer is provided on the second electrode. The first insulating layer includes silicon, carbon, and nitrogen.
Claims13
An isolator, comprising:
- a first electrode;
- a second electrode provided on the first electrode and separated from the first electrode;
- a first pad provided on one end of the second electrode and electrically connected to the one end of the second electrode;
- a second pad provided on other end of the second electrode and electrically connected to the other end of the second electrode;
- and
- a first insulating region provided on the second electrode, the first insulating region consisting of silicon, carbon, and nitrogen, the first insulating region directly contacting an upper surface of the second electrode,
- wherein a concentration of carbon in the first insulating region is not less than 10 mass % and not more than 45 mass %.
An isolator, comprising:
- a first electrode;
- a second electrode provided on the first electrode and separated from the first electrode;
- a first pad provided on one end of the second electrode and electrically connected to the one end of the second electrode;
- a second pad provided on other end of the second electrode and electrically connected to the other end of the second electrode;
- and
- a first insulating region provided on the second electrode, the first insulating region consisting of silicon, carbon, and nitrogen, the first insulating region directly contacting an upper surface of the second electrode, wherein
- a concentration of hydrogen in the first insulating region is not less than 0.5 mass % and not more than 5 mass %.
An isolator, comprising:
- a first electrode;
- a second electrode provided on the first electrode and separated from the first electrode;
- a first pad provided on one end of the second electrode and electrically connected to the one end of the second electrode;
- a second pad provided on other end of the second electrode and electrically connected to the other end of the second electrode;
- a first insulating region provided on the second electrode, the first insulating region including silicon, carbon, and nitrogen, and the first insulating region directly contacting an upper surface of the second electrode;
- a conductive body provided around the first and second electrodes along a first plane perpendicular to a first direction, the first direction being from the first electrode toward the second electrode, the conductive body being electrically connected to a reference potential;
- and
- a second insulating portion provided between the second electrode and the conductive body, the first insulating region directly contacting an upper surface of the second insulating portion, wherein
- a maximum concentration of a metal at an interface between the second insulating portion and the first insulating region is not more than 100 times a minimum concentration of the metal in the second insulating portion and the first insulating region.
Dependencies are inferred from the claim text.