Substrate processing condition setting method, substrate processing method, substrate processing condition setting system, and substrate processing system

A substrate processing condition setting system comprising:

• storage that stores therein a training processing condition and a trained model that is subjected to machine training based on a processing result obtained by processing a substrate under the training processing condition;
• a display section;
• an operator to receive an operation by a user;
• and
• a controller, wherein
• the controller
• acquires a plurality of estimation processing results by inputting a plurality of processing conditions to the trained model;
• causes the display section to display an image including a distribution chart based on the estimation processing results, to display a plurality of marks on the distribution chart based on the plurality of the estimation processing results, and to display a curved response surface that is generated by interpolation between respective points of the plurality of marks or is generated by an approximate function generated based on the respective points of the plurality of marks, the marks each being user selectable through the operator;
• and
• upon the user's operation on the operator to select one of the marks on the distribution chart, sets one processing condition corresponding to the one selected mark as an actual processing condition in substrate processing, the one processing condition corresponding to one estimation processing result of the estimation processing results.