System for stabilizing flow of gas introduced into sensor

A sensor gas flow stabilization system in manufacturing equipment, the system comprising:

• a process chamber;
• a process chamber vacuum line;
• a sensor device having an inlet and an outlet, wherein the outlet of the sensor device is connected to the process chamber vacuum line;
• a sensor connection pipe connecting the processing chamber to the inlet of the sensor device at an end of the sensor connection pipe, wherein the sensor device is configured to receive an internal gas of the process chamber through the sensor connection pipe;
• a bypass pipe connected to the end of the sensor connection pipe, wherein the bypass pipe is configured to discharge part of the internal gas flowing through the sensor connection pipe in such a manner that the internal gas of the process chamber can be stably provided to the sensor device within a predetermined range per unit time even though there is a change in a pressure of the process chamber;
• and
• a vacuum pump connected to a process chamber vacuum line to remove the internal gas of the process chamber.