System and method for ion source temperature control using symmetric or asymmetric application of force

An ion implantation system, comprising:

• an ion source comprising:
• an arc chamber comprising a plurality of chamber walls and having a first end and a second end;
• and
• a faceplate having an extraction aperture disposed on a top of the plurality of chamber walls;
• a source housing, wherein the arc chamber is disposed on the source housing;
• a first fastener and a second fastener to press the faceplate against the top of the plurality of chamber walls, wherein the first fastener is disposed near the first end and the second fastener is disposed near the second end;
• and
• a first adjustable tension system in communication with the first fastener to apply tension to the first fastener and a second adjustable tension system in communication with the second fastener to apply tension to the second fastener;
• wherein each adjustable tension system comprises an actuator and a tension system, wherein the tension system comprises a yoke to attach to a respective fastener, a retaining bracket, and a spring disposed between the yoke and the retaining bracket;
• and wherein the actuator includes a shaft and wherein movement of the shaft varies a distance between the retaining bracket and the yoke.

An ion implantation system, comprising:

• an ion source comprising:
• an arc chamber comprising a plurality of chamber walls and having a first end and a second end;
• and
• a faceplate having an extraction aperture disposed on top of the plurality of chamber walls;
• a source housing, wherein the arc chamber is disposed on the source housing;
• a first fastener disposed near the first end and a second fastener disposed near the second end;
• and
• a first adjustable tension system in communication with the first fastener to apply tension to the first fastener and a second adjustable tension system in communication with the second fastener to apply tension to the second fastener, wherein each adjustable tension system comprises an actuator;
• and
• a controller, in communication with the first adjustable tension system and the second adjustable tension system, to supply a desired tension to each adjustable tension system, wherein the controller supplies a command signal to each adjustable tension system and receives a feedback signal from each adjustable tension system, wherein the feedback signal is indicative of actual tension experienced by each adjustable tension system.