Spray-coated electrostatic chuck design
AssigneeApplied Materials, Inc.
InventorsTuck Foong Koh, Sarath Babu, Yuichi Wada
Life of this patent
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Abstract
Embodiments of the disclosure include a substrate support including a metal body with a substrate face, a plurality of lift pin holes formed in the body, and a dielectric coating disposed on the substrate face of the body. Each of the plurality lift pin holes includes a through hole and a chamfer face configured to mate with a lift pin sleeve. The dielectric coating includes a substrate supporting surface, a thickness, and a pattern disposed in the substrate supporting surface.
Claims15
A substrate support, comprising:
- a body having a substrate face, wherein the body comprises a metal;
- a plurality of lift pin holes formed in the body, wherein each of the plurality lift pin holes comprises:
- a through hole;
- and
- a chamfer face extending between the substrate face and the through hole, wherein the chamfer face is configured to mate with a lift pin sleeve of a plurality of lift pin sleeves, wherein each lift pin sleeve of the plurality of lift pin sleeves includes a sleeve body with exterior threads disposed on an exterior of the sleeve body;
- a dielectric coating disposed on the substrate face and the chamfer face, wherein the dielectric coating comprises:
- a substrate supporting surface;
- a thickness;
- and
- a pattern disposed in the substrate supporting surface;
- and
- a plurality of sleeve nuts, the exterior threads of each lift pin sleeve configured to be threaded into a respective sleeve nut of the plurality of sleeve nuts, wherein each sleeve nut of the plurality of sleeve nuts is configured to secure a surface of each lift pin sleeve of the plurality of lift pin sleeves to a portion of the dielectric coating disposed over the chamfer face.
An electrostatic chuck assembly, configured to support a substrate when the substrate is disposed on an electrostatic chuck, wherein the electrostatic chuck assembly comprises:
- a body of the electrostatic chuck assembly;
- a substrate face configured to face the substrate;
- a dielectric coating disposed on the body, wherein the dielectric coating comprises:
- a top;
- a thickness;
- and
- a pattern disposed in the substrate face;
- a plurality of lift pin holes disposed in the body, wherein each of the plurality of lift pin holes comprises:
- a top face coated by the dielectric coating;
- a chamfer face coated by the dielectric coating;
- and
- a depth;
- a plurality of lift pin sleeves, disposed within the plurality of lift pin holes, wherein the each of the plurality of lift pin sleeves comprises:
- a sleeve body comprising a sleeve material;
- a substrate face;
- a pin hole disposed through the sleeve body;
- an exterior threaded region disposed on an exterior of the sleeve body;
- and
- a chamfer disposed on an exterior of the sleeve body;
- and
- a plurality of sleeve nuts, each exterior threaded region of the plurality of lift pin sleeves configured to be threaded into a corresponding sleeve nut of the plurality of sleeve nuts, each sleeve nut of the plurality of sleeve nuts configured to secure the chamfer to the dielectric coating of the chamfer face.
A method of manufacturing a body of an electrostatic chuck assembly comprising:
- forming the body comprising:
- a substrate face;
- and
- a base face;
- forming a plurality of lift pin holes through the substrate face of the body to the base face of the body;
- chamfering the plurality of lift pin holes in the substrate face of the body to form a chamfer face of each lift pin hole of the plurality of lift pin holes;
- coating the body with a dielectric coating;
- forming a pattern in the dielectric coating disposed over the substrate face;
- forming a plurality of nut recesses in the base face of the body;
- polishing the dielectric coating disposed over the substrate face;
- disposing a lift pin sleeve in a lift pin hole of the plurality of lift pin holes, the lift pin sleeve comprising:
- a threaded region disposed on an exterior of a sleeve body;
- and
- a chamfer region disposed over the dielectric coating disposed on the chamfer face;
- and
- securing the chamfer region to the chamfer face of the dielectric coating by securing a sleeve nut to the threaded region of the lift pin sleeve, the sleeve nut disposed in a nut recess of the plurality of nut recesses.
Dependencies are inferred from the claim text.