Shielded gas inlet for an ion source

An ion source comprising:

• an arc chamber having one or more radiation generating features defined therein, wherein the arc chamber comprises an arc chamber body generally enclosing an internal volume, and wherein the arc chamber body has a gas inlet aperture defined therein;
• a gas source configured to provide a gas through the gas inlet aperture;
• and
• one or more shields positioned proximate to the gas inlet aperture, wherein the one or more shields comprise a plurality of rigid plates in a stacked formation, wherein the one or more shields provide a fluid communication between the gas inlet aperture and the internal volume, and wherein the one or more shields minimize a line-of-sight from the one or more radiation generating features to the gas inlet aperture and are configured to substantially prevent thermal radiation from reaching the gas inlet aperture from the one or more radiation generating features.

An ion source comprising:

• an arc chamber having one or more radiation generating features defined therein, wherein the arc chamber comprises an arc chamber body generally enclosing an internal volume, and wherein the arc chamber body has a gas inlet aperture defined therein;
• a gas source configured to provide a gas through the gas inlet aperture;
• and
• a plurality of shields positioned proximate to the gas inlet aperture, wherein one or more of the plurality of shields have one or more shield apertures defined therein, wherein the plurality of shields provide a fluid communication between the gas inlet aperture and the internal volume, and wherein the plurality of shields minimize a line-of-sight from the one or more radiation generating features to the gas inlet aperture and are configured to substantially prevent thermal radiation from reaching the gas inlet aperture from the one or more radiation generating features.

An ion source comprising:

• an arc chamber having one or more radiation generating features defined therein, wherein the arc chamber comprises an arc chamber body generally enclosing an internal volume, wherein the arc chamber body comprises one or more liners, and wherein the arc chamber body has a gas inlet aperture defined therein;
• a gas source configured to provide a gas through the gas inlet aperture;
• and
• one or more shields positioned proximate to the gas inlet aperture, wherein the one or more shields provide a fluid communication between the gas inlet aperture and the internal volume, and wherein the one or more shields minimize a line-of-sight from the one or more radiation generating features to the gas inlet aperture and are configured to substantially prevent thermal radiation from reaching the gas inlet aperture from the one or more radiation generating features, and wherein the one or more shields are operably coupled to the one or more liners.

An ion source comprising:

• an arc chamber configured to form a plasma column;
• a gas inlet aperture defined in a wall of the arc chamber;
• one or more shields, wherein the one or more shields generally prevent a line of sight from the plasma column to the gas inlet aperture, and wherein the one or more shields generally define one or more walls of the arc chamber;
• and
• a cathode and a repeller respectively positioned at opposite ends of the arc chamber, wherein the arc chamber is symmetrical, and whereby the one or more shields are configured to provide a uniform erosion of the cathode and repeller.