Charged particle beam device and scan waveform generation method

A charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam, the charged particle beam device comprising:

• a deflection coil that scans the charged particle beam on the specimen;
• a D/A converter that converts a digital scan waveform into an analog scan waveform and outputs the analog scan waveform to the deflection coil to drive the deflection coil;
• and
• a scan waveform generation unit that generates the digital scan waveform and outputs the digital scan waveform to the D/A converter,
• wherein the scan waveform generation unit has a look up table that stores parameters for correcting the digital scan waveform and includes a correction circuit that corrects a distortion characteristic of the deflection coil, and
• wherein the scan waveform generation unit outputs the digital scan waveform according to a mode signal, and the mode signal is input from outside of the scan waveform generation unit and indicates whether to perform a correction of the distortion characteristic or to, without performing the correction of the distortion characteristic, capture an image without using a rising portion and a falling portion of the scan waveform.