MEMS switch with beam contact portion continuously extending between input and output terminal electrodes

A microelectromechanical system (MEMS) switch, comprising:

• an input terminal electrode;
• an output terminal electrode;
• a pull-down electrode positioned between the input terminal electrode and the output terminal electrode;
• a movable beam positioned proximate the input terminal electrode and the output terminal electrode, the movable beam comprising:
• an upper conductive layer;
• a lower conductive layer having a first conductivity;
• a contact incorporated into the lower conductive layer, wherein:
• the contact has a second conductivity that is more than the first conductivity;
• and
• the contact is configured, with respect to the input terminal electrode and the output terminal electrode, to limit on-state resistance between the input terminal electrode and the output terminal electrode;
• and
• an array of vias that join the upper conductive layer to the lower conductive layer;
• and
• the movable beam is configured to move between:
• an on-state that electrically couples the contact of the movable beam with the input terminal electrode and the output terminal electrode;
• and
• an off-state that electrically isolates the contact of the movable beam from the input terminal electrode and the output terminal electrode.