Manufacturing apparatus of semiconductor device and manufacturing method of semiconductor device

A manufacturing apparatus of a semiconductor device, comprising:

• a plurality of processing heads provided apart from each other in order to perform predetermined processing in different positions on a common substrate, wherein each of the plurality of processing heads comprises a camera taking an image of the substrate;
• and
• a controller controlling driving of the plurality of processing heads and conveyance of the substrate, wherein the controller positions each of the plurality of processing heads with respect to the substrate at a position where at least an optical offset due to a variation in optical characteristics between the plurality of cameras in the plurality of processing heads is canceled out, wherein
• the controller, before the positioning,
• takes an image of one optical inspection part comprising a reference and an object located apart from the reference by the camera of each of the plurality of processing heads and acquires an optical inspection image corresponding to each of the plurality of processing heads, and
• calculates, as the optical offset, an amount of difference between the processing heads in a relative positional relationship between the reference and the object shown in the optical inspection image.