Pre-wet liquid, resist film forming method, pattern forming method, and kit
AssigneeFUJIFILM Corporation
InventorSatomi Takahashi
Life of this patent
Estimating the term…
Abstract
The pre-wet liquid is provided. The pre-wet liquid has a surface tension of 29.0 mN/m or more, a viscosity of 1.8 cP or less, and a vapor pressure of 2.5 to 5.0 mmHg, in a case of consisting of a single solvent, the pre-wet liquid has an SP value of 25.0 MPa1/2 or less and does not have a benzene ring group, and in a case of consisting of a mixed solvent, the pre-wet liquid satisfies the requirement 1 in which is a mixed solvent consisting of only two or more kinds of organic solvents A having specific SP value and specific surface tension and having no benzene ring group or the requirement 2 in which is a mixed solvent of an organic solvent A and an organic solvent B having specific SP value and specific surface tension.
Claims8
A pre-wet liquid having a surface tension of 29.0 mN/m or more, a viscosity of 1.4 cP or less, and a vapor pressure of 3.2 to 4.2 mmHg,
- wherein the pre-wet liquid consists of a single solvent which is one kind of organic solvent or a mixed solvent of two or more kinds of organic solvents,
- in a case where the pre-wet liquid consists of the single solvent, the organic solvent is ethyl pyruvate, and
- in a case where the pre-wet liquid consists of the mixed solvent, the mixed solvent satisfies the following requirement 1 or requirement 2,
- requirement 1:
- the mixed solvent is a mixed solvent consisting of only two or more kinds of organic solvents A, and the organic solvent A is an organic solvent selected from the group consisting of ethyl pyruvate, methyl pyruvate, methyl acetoacetate, methyl methoxyacetate, acetyl acetone, dimethyl malonate, methyl 3-methoxypropionate, diethyl oxalate, ethyl 2-methylacetoacetate, acetonyl acetone, 1,2-diacetoxypropane, cyclohexanone, and 2-methoxy-1,3 dioxolane,
- requirement 2:
- the mixed solvent is a mixed solvent of the organic solvent A and an organic solvent B, and the organic solvent B is an organic solvent selected from the group consisting of propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, butyl acetate, isoamyl acetate, amyl acetate, butyl propionate, isobutyl propionate, and pentyl acetate.
Dependencies are inferred from the claim text.