Laser crystallization apparatus
AssigneeSamsung Display Co., Ltd.
InventorsAkifumi Sangu, Je Kil Ryu, Cheol Ho Park, Hae Sook Lee, Jin Hong Jeun, Young Su Chae, Gyoo Wan Han
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AssigneeSamsung Display Co., Ltd.
InventorsAkifumi Sangu, Je Kil Ryu, Cheol Ho Park, Hae Sook Lee, Jin Hong Jeun, Young Su Chae, Gyoo Wan Han
Estimating the term…
A laser crystallization apparatus according to an embodiment includes: a light source unit which irradiates a laser beam; and a path conversion unit which converts the laser beam incident from the light source unit into a linear beam having a long axis parallel to a first direction and a short axis parallel to a second direction. The linear beam propagates in a third direction perpendicular to the first direction and the second direction, the path conversion unit includes an incident window extending parallel to a first length direction, an emission window extending parallel to a second direction, a first reflection unit disposed at the same side with the incident window, and a second reflection unit disposed at the same side with the emission window, and the second length direction extends parallel to the first direction in a view of the third direction.
A laser crystallization apparatus comprising:
A laser crystallization apparatus comprising:
Dependencies are inferred from the claim text.