US 12,474,215 B2Granted

Electromagnetic wave sensor

AssigneeTDK Corporation

InventorsShinji Hara, Naoki Ohta, Kazuya Maekawa, Susumu Aoki, Maiko Shirokawa

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Abstract

An electromagnetic wave sensor has electromagnetic wave absorbers disposed side by side in first and second directions, temperature detection portions held by the respective electromagnetic wave absorbers and sets of two arm portions connected to each of the electromagnetic wave absorbers at two connection portions. In a plan view, the arm portions have two first extending portions extending from the connection portions in directions of which components in the second direction are opposite to each other, and two second extending portions extending from the first extending portions in directions of which components in the first direction are opposite to each other. Four sides of a rectangle circumscribing each of the electromagnetic wave absorbers with a smallest area are inclined with respect to the first direction in directions in which each of the electromagnetic wave absorbers approaches the second extending portions with the connection portions as fulcrums.

Claims9

Dependent claims

An electromagnetic wave sensor comprising:

electromagnetic wave absorbers that are disposed side by side in a first direction and a second direction intersecting each other within a plane;
temperature detection portions that are held by the respective electromagnetic wave absorbers;
and
a set of two arm portions that are in a bent line shape and connected to each of the electromagnetic wave absorbers at two connection portions in each of the electromagnetic wave absorbers,
wherein in a plan view, the two arm portions have two first extending portions extending from the two connection portions in directions of which components in the second direction are opposite to each other, and two second extending portions extending from the two first extending portions in directions of which components in the first direction are opposite to each other, and
wherein in a plan view, four sides of a rectangle or a square circumscribing each of the electromagnetic wave absorbers with a smallest area are inclined with respect to the first direction to have an inclination, the inclination being in directions in which each of the electromagnetic wave absorbers approaches the two second extending portions with the two connection portions as fulcrums.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application: 17/889,149Filed 16 Aug 2022
Priority: JP 2021-13480520 Aug 2021
Published: US 2023/0055177 A123 Feb 2023
Granted: 18 Nov 2025
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01J 5/10
Radiation pyrometry, e.g. infrared or optical thermometry: using electric radiation detectors
G01J 5/023
Shape of the cavity itself or of elements contained in or suspended over the cavity: particular leg structure or construction or shape; Nanotubes
G01J 5/0853
Optical arrangements: having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the…
G01J 5/20
Using electric radiation detectors: using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices