Leak detection from diaphragm compressor

A diaphragm compressor, comprising

• a compressor head comprising a hydraulic fluid plate having a fluid plate contact plane and a process fluid plate having a process plate contact plane, the hydraulic fluid plate and the process fluid plate forms a compression chamber when contact between the fluid plate contact plane and the process plate contact plane is established, the compression chamber is divided in an upper chamber and a lower chamber by a multi-layered diaphragm,
• wherein a controller is configured for controlling an alternating movement of the multi-layered diaphragm towards the upper and the lower chambers respectively,
• wherein a process fluid plate seal is positioned in a process fluid seal groove provided in the process plate contact plane, the process fluid plate seal forms a process fluid seal between an upper side of the multi-layered diaphragm and the process plate contact plane,
• wherein the process fluid plate comprises a process fluid leak groove system fluidly connected to a process fluid plate leakage passage provided in the process fluid plate, and
• wherein the process fluid leak groove system comprises an inner groove and an outer groove connected with a plurality of connection grooves.