Microlens arrays and method for fabricating the same

A method for fabricating a microlens array comprising:

• step S1, providing a first substrate, and forming a patterned mask layer on the first substrate;
• step S2, etching the first substrate to form spaced grooves;
• step S3, removing the patterned mask layer;
• step S4, attaching a photoresist layer to an upper surface of the first substrate;
• step S5, softening the photoresist layer to adhere to inner walls of the spaced grooves to form a concave smooth surface;
• step S6, curing the photoresist layer to form a working mold;
• and either of
• step S71 or step S72;
• wherein the step S71 includes:
• providing a second substrate, coating an adhesive material on the second substrate;
• turning the second substrate over, and pressing the second substrate against the working mold;
• ultraviolet (UV) curing the adhesive material, and separating the second substrate from the working mold, and forming the microlens array on a surface of the second substrate;
• and
• the step S72 includes:
• injecting a polydimethylsiloxane (PDMS) material into a surface of the working mold, peeling the PDMS material off after solidification, and forming the microlens array on a surface of the PDMS material.