Support unit and substrate treating apparatus including the same
AssigneeSemes Co., Ltd.
InventorsKang Sul Kim, Hee Man Ahn
Life of this patent
Estimating the term…
Abstract
The present invention provides a substrate treating apparatus, including: a treatment container having a treatment space therein; a support unit for supporting and rotating the substrate in the treatment space; and a liquid supply unit for supplying a liquid onto the substrate, in which wherein the support unit includes: a body on which the substrate is seated; and a support shaft coupled to the body, and an upper surface of the body is provided with a central portion including a center of the body and an edge portion surrounding the central portion, and a vacuum hole is formed in the central portion, and a groove is formed in the edge portion.
Claims18
A substrate treating apparatus, comprising:
- a treatment container having a treatment space therein;
- a support unit configured to support and rotate a substrate in the treatment space;
- and
- a liquid supply unit configured to supply a liquid on the substrate,
- wherein the support unit includes
- a body on which the substrate is seated;
- and
- a support shaft coupled to the body,
- an upper surface of the body has a central portion including a center of the body and an edge portion surrounding the central portion, the edge portion extending from the central portion to an end of the body, and
- the central portion defines a vacuum hole, and the edge portion defines a groove, wherein the upper surface of the body has a smaller area than the substrate when viewed from a top view,
- an upper surface of the central portion is lower than an upper surface of the edge portion, a support protrusion configured to support the substrate is on the upper surface of the central portion, and
- at least a portion of the upper surface of the edge portion and an upper end of the support protrusion are at a same height.
A support unit for supporting and rotating a substrate, the support unit comprising:
- a body on which the substrate is seated;
- and
- a support shaft coupled to the body with a vacuum flow path therein,
- wherein an upper surface of the body has a central portion including a center of the body and an edge portion surrounding the central portion, the edge portion extending from the central portion to an end of the body,
- a vacuum hole communicating with one end of the vacuum flow path is in a center of the central portion, and a ring-shaped groove is along a circumference of the edge portion, and
- the ring-shaped groove has a first side surface and a second side surface located farther from the center of the body than the first side surface when viewed from a cross-section cut in a width direction of the ring-shaped slit,
- wherein in the ring-shaped groove, a protrusion protruding in a direction away from the center of the body is on an upper portion of the first side surface.
A substrate treating apparatus, comprising:
- a housing having an inner space;
- a treatment container positioned within the inner space and having a treatment space;
- a support unit configured to support and rotate a substrate in the treatment space;
- a liquid supply unit configured to supply a liquid onto the substrate;
- and
- an airflow supply unit coupled to an upper surface of the housing and configured to supply gas forming a downward airflow to the inner space,
- wherein the support unit includes
- a body on which the substrate is seated;
- and
- a support shaft coupled to the body with a vacuum flow path therein, and
- an upper surface of the body has a central portion including a center of the body and an edge portion surrounding the central portion,
- a vacuum hole communicating with one end of the vacuum flow path is in a center of the central portion,
- an upper surface of the central portion is lower than an upper surface of the edge portion and includes a support protrusion configured to support the substrate,
- a ring-shaped groove is along a circumference of the edge portion, and
- the ring-shaped groove has a first side surface and a second side surface located farther from the center of the body than the first side surface when viewed from a cross-section cut in a width direction of the ring-shaped groove.
Dependencies are inferred from the claim text.