Systems for removing or inserting a fastener from or into a wafer carrier

A system for removing or affixing an associated fastener from an associated wafer carrier, the system comprising:

• a robotic arm having a screw tool assembly disposed at an operating end thereof;
• wherein the screw tool assembly comprises:
• an upper sleeve element having a screwdriver head disposed therein and a lower aperture present in a lower base;
• and
• a lower sleeve element including a cylindrical sidewall with an internal thread having at least one turn on an inside of the sidewall, and a lip extending outwards from an upper end of the lower sleeve element, wherein the lip engages the lower base of the upper sleeve element, the lower sleeve configured to fit within the upper sleeve and configured to move telescopically through the lower aperture of the upper sleeve element, and wherein the lower sleeve element has a width sufficient to surround the head of the associated fastener;
• and
• a screw buffer table that comprises a plurality of apertures, each aperture including an aperture thread configured to engage and hold the associated fastener.

A system for removing or affixing an associated fastener from an associated wafer carrier, the system comprising:

• an entry load port;
• an exit load port;
• and
• a robotic arm having a screw tool assembly disposed at an operating end thereof;
• wherein the screw tool assembly comprises:
• an upper sleeve element having a screwdriver head disposed therein and a lower aperture;
• a motor configured to rotate the screwdriver head;
• and
• a lower sleeve element including an internal thread having at least one turn, the lower sleeve element configured to fit within the upper sleeve element and configured to move telescopically through the lower aperture of the upper sleeve element, and the internal thread being configured to engage a head of the associated fastener, and wherein the lower sleeve element has a width sufficient to surround the head of the associated fastener;
• and
• a screw buffer table that comprises a plurality of apertures, each aperture including an aperture thread configured to engage and hold the associated fastener;
• wherein the robotic arm is fixed in place relative to the entry load port or the exit load port.