Methods and apparatus for cleaning a vessel
AssigneeASM IP Holding B.V.
InventorsJereld Lee Winkler, Paul Ma, Eric James Shero, Shubham Garg, Jonathan Bakke, Todd Dunn, Jacqueline Wrench, Shuaidi Zhang
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AssigneeASM IP Holding B.V.
InventorsJereld Lee Winkler, Paul Ma, Eric James Shero, Shubham Garg, Jonathan Bakke, Todd Dunn, Jacqueline Wrench, Shuaidi Zhang
Estimating the term…
Various embodiments of the present technology may provide methods and apparatus for cleaning a source vessel. The source vessel may be filled or partially filled with a solvent to form a solution. The solution is removed from the source vessel and contained in a waste vessel that is connected to the source vessel. The waste vessel may have a bellow or other mechanism inside of it to create a negative pressure in the waste vessel to pull the solution out of the source vessel and into the waste vessel. Alternatively, a liquid pump may be used to pull the solution from the source vessel to the waste vessel.
An apparatus, comprising:
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Dependencies are inferred from the claim text.