MEMS device and method for operating a MEMS device

A micro-electro-mechanical system (MEMS) device comprising:

• a piezoelectric transducer element having a first transducer region and a second transducer region;
• a deflectable structure comprising the piezoelectric transducer element;
• and
• a control circuit configured to:
• readout a first sensor signal from the first transducer region of the piezoelectric transducer element based on a deflection of the deflectable structure;
• determine a control signal from the readout first sensor signal, wherein the control signal has a counteracting effect on the deflection of the deflectable structure when provided to the piezoelectric transducer element;
• and
• provide the control signal to the piezoelectric transducer element for counteracting the deflection of the deflectable structure,
• wherein the first transducer region comprises a piezoelectric material disposed between a first readout terminal and a counter electrode, and
• wherein the second transducer region comprises the piezoelectric material disposed between a second readout terminal and the counter electrode.

A method for operating a MEMS device comprising a piezoelectric transducer element having a first transducer region and a second transducer region, a deflectable structure comprising the piezoelectric transducer element, and a control circuit, the method comprising:

• reading out, by the control circuit, a first sensor signal from the first transducer region of the piezoelectric transducer element based on a deflection of the deflectable structure;
• determining, by the control circuit, a control signal from at least the readout first sensor signal, wherein the control signal has a counteracting effect on the deflection of the deflectable structure when provided to the piezoelectric transducer element;
• providing, by the control circuit, the control signal to the first transducer region of the piezoelectric transducer element for counteracting the deflection of the deflectable structure;
• and
• wherein the first transducer region comprises a piezoelectric material disposed between a first readout terminal and a counter electrode, and
• wherein the second transducer region comprises the piezoelectric material disposed between a second readout terminal and the counter electrode.

A micro-electro-mechanical system (MEMS) device comprising:

• a piezoelectric transducer element having a first transducer region;
• a deflectable structure comprising the piezoelectric transducer element;
• and
• a control circuit configured to:
• readout a first sensor signal from the first transducer region of the piezoelectric transducer element and a second sensor signal from a second transducer region of the piezoelectric transducer element based on a deflection of the deflectable structure;
• determine a control signal from the readout first and second sensor signals, wherein the control signal has a counteracting effect on the deflection of the deflectable structure when provided to the piezoelectric transducer element;
• and
• provide the control signal to a counter electrode of the piezoelectric transducer element for counteracting the deflection of the deflectable structure,
• wherein the first transducer region comprises a first piezoelectric material between a first readout terminal and the counter electrode,
• wherein the second transducer region comprises a second piezoelectric material between a second readout terminal and the counter electrode, and
• wherein the first piezoelectric material between the first readout terminal and the counter electrode and the second piezoelectric material between the second readout terminal and the counter electrode comprise an opposite pre-polarization.