Method for preparing a thin layer that includes forming a weakened zone in a central portion of a donor substrate that does not extend into a peripheral portion of the donor substrate and initiating and propagating a splitting wave in the weakened zone that does completely not propagate through the peripheral portion
AssigneesSoitec, Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsFrédéric Mazen, François Rieutord, Marianne Coig, Helen Grampeix, Didier Landru, Oleg Kononchuk, Nadia Ben Mohamed
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