Lattice based voltage standoff
AssigneeApplied Materials, Inc.
InventorsAdam M. McLaughlin, Craig R. Chaney
Life of this patent
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Abstract
An insulator that has a lattice is disclosed. The insulator may have a shaft with two ends. The lattice may be disposed on the outer surface of the shaft. In some embodiments, one or more sheaths are used to cover portions of the shaft. A lattice may also be disposed on the inner wall and/or outer walls of the sheaths. The lattice serves to increase the tracking length between the two ends of the shaft. This results in longer times before failure. This insulator may be used in an ion implantation system to physically and electrically separate two components.
Claims17
An insulator, comprising:
- a shaft having a first end and a second end;
- and
- a shaft lattice disposed on an outer surface of the shaft.
An insulator, comprising:
- an open box having a plurality of mounting holes for connection to an indirectly heated cathode ion source and other components, where one or more of the plurality of mounting holes are disposed on an inner surface of the open box;
- and
- a lattice disposed in the open box and between the plurality of mounting holes so as to increase a tracking length.
Dependencies are inferred from the claim text.