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US 12,469,664 B2Granted
Charged particle gun and charged particle beam system
AssigneeHitachi High-Tech Corporation
InventorsMasahiro Fukuta, Keigo Kasuya, Noriaki Arai
Life of this patent
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Abstract
An electron gun 901 capable of suppressing an uneven temperature distribution at an extraction electrode and a length-measuring SEM 900 are provided. The electron gun 901 is equipped with: a charged particle source 1; an extraction electrode 3 for extracting charged particles from the charged particle source 1 and allowing some of the charged particles to pass while blocking some other charged particles; and an auxiliary structure 5 disposed in contact with the extraction electrode 3. The length-measuring SEM 900 is equipped with the electron gun 901 and a computer system 920 for controlling the electron gun 901.
Claims14
A charged particle gun comprising:
- a charged particle source;
- an extraction electrode that extracts charged particles from the charged particle source, allows some of the charged particles to pass therethrough, and blocks some other charged particles;
- and
- a continuous heat transfer structure that is different from the extraction electrode and comes into contact with two or more surfaces including at least a perpendicular surface of the extraction electrode with respect to a traveling direction of the charged particles extracted from the charged particle source, facing the traveling direction and a surface of the extraction electrode parallel to the traveling direction, at an area or at a position opposed to the charged particle source with respect to the extraction electrode.
1 more element
A charged particle gun comprising:
- a charged particle source;
- an extraction electrode that extracts charged particles from the charged particle source, allows some of the charged particles to pass therethrough, and blocks some other charged particles;
- a continuous heat transfer structure that is different from the extraction electrode and comes into contact with two or more surfaces including at least a perpendicular surface with respect to a traveling direction of the charged particles extracted from the charged particle source, facing the traveling direction and a surface parallel to the traveling direction, outside the extraction electrode;
- a conductive member for applying a voltage to the extraction electrode;
- and
- an adjustment mechanism that adjusts a positional relationship between the extraction electrode and the conductive member, wherein
- the adjustment mechanism adjusts a positional relationship between the extraction electrode and the conductive member and fixes the extraction electrode and the conductive member in a state where the extraction electrode and the conductive member are in contact with each other, and a central axis of the extraction electrode, a central axis of the conductive member, and a central axis of the charged particle source match each other.
4 more elements
A charged particle gun comprising:
- a charged particle source;
- an extraction electrode that extracts charged particles from the charged particle source, allows some of the charged particles to pass therethrough, and blocks some other charged particles;
- and
- a continuous heat transfer structure that is different from the extraction electrode and comes into contact with two or more surfaces including at least a perpendicular surface with respect to a traveling direction of the charged particles extracted from the charged particle source, facing the traveling direction and a surface parallel to the traveling direction, outside the extraction electrode;
- wherein the heat transfer structure uses gold, silver, copper, or aluminum as a base material.
2 more elements
A charged particle gun comprising:
- a charged particle source;
- an extraction electrode that extracts charged particles from the charged particle source, allows some of the charged particles to pass therethrough, and blocks some other charged particles;
- and
- a continuous heat transfer structure that is different from the extraction electrode and comes into contact with two or more surfaces including at least a perpendicular surface with respect to a traveling direction of the charged particles extracted from the charged particle source, facing the traveling direction and a surface parallel to the traveling direction, outside the extraction electrode;
- wherein in the heat transfer structure, at least a part of a surface which is not in contact with the extraction electrode contains a metal having an emissivity of 0.1 or higher.
2 more elements
A charged particle gun comprising:
- a charged particle source;
- an extraction electrode that extracts charged particles from the charged particle source, allows some of the charged particles to pass therethrough, and blocks some other charged particles;
- and
- a continuous heat transfer structure that is different from the extraction electrode and comes into contact with two or more surfaces including at least a perpendicular surface with respect to a traveling direction of the charged particles extracted from the charged particle source, facing the traveling direction and a surface parallel to the traveling direction, outside the extraction electrode;
- wherein the heat transfer structure uses a material having a specific heat of 0.6 J/kgK or less and a specific gravity of 5 g/cm3 or less as a base material, and
- wherein the heat transfer structure is covered with a material having a thermal conductivity of 10 W/mK or higher.
3 more elements
Dependencies are inferred from the claim text.