Microelectromechanical systems power relay

An electric relay circuit for use with a load, comprising:

• a stator assembly that has a chamber partially defined therethrough along a central longitudinal axis, wherein the stator assembly includes a non-conductive substrate, a layer or layers including components with which the load interacts mechanically or electrically, a first ferromagnetic layer that is adjacent to a spacer, a first plurality of coils that is adjacent to the first ferromagnetic layer, a second ferromagnetic layer that is adjacent to the first plurality of coils, a second plurality of coils that is adjacent to the second ferromagnetic layer, and a third ferromagnetic layer that is adjacent to the second plurality of coils, wherein a bottom surface of the third ferromagnetic layer is at a top end of the chamber;
• a plunger assembly that is situated in the chamber of the stator assembly and, in operation, moves along the central longitudinal axis between a first position and a second position, the plunger assembly including a plunger that includes a pair of ferromagnetic plates with a magnet situated therebetween, wherein (i) a first ferromagnetic plate of the pair of ferromagnetic plates is situated between the first and second ferromagnetic layers and (ii) a second ferromagnetic plate of the pair of ferromagnetic plates is situated between the second and third ferromagnetic layers;
• and
• the pair of ferromagnetic plates and the first, second, and third ferromagnetic layers further cooperating to drive at least one contact that includes:
• a first contact member having a base with an exposed surface, the base having a first pocket opening to the exposed surface, the first pocket having a circumscribing side wall and a bottom wall that defines an interior of the first pocket;
• a first metal layer on the bottom wall of the first pocket and having a top surface that is below the exposed surface of the first contact member;
• a liquid metal layer on the top surface of the first metal layer and extending above the exposed surface of the first contact member;
• and
• a second contact member having a contact surface, the second contact member positioned adjacent the first contact member in an open position and movable to a closed position in which the contact surface of the second contact member contacts and compresses the liquid metal layer and the first metal layer.

An electric relay circuit for use with a load, comprising:

• a stator assembly that has a chamber partially defined therethrough along a central longitudinal axis, wherein the stator assembly includes a non-conductive substrate, a layer or layers including components with which the load interacts mechanically or electrically, a first ferromagnetic layer that is adjacent to a spacer, a first plurality of coils that is adjacent to the first ferromagnetic layer, a second ferromagnetic layer that is adjacent to the first plurality of coils, a second plurality of coils that is adjacent to the second ferromagnetic layer, and a third ferromagnetic layer that is adjacent to the second plurality of coils, wherein a bottom surface of the third ferromagnetic layer is at a top end of the chamber;
• a plunger assembly that is situated in the chamber of the stator assembly and, in operation, moves along the central longitudinal axis between a first position and a second position, the plunger assembly including a plunger that includes a pair of ferromagnetic plates with a magnet situated therebetween, wherein (i) a first ferromagnetic plate of the pair of ferromagnetic plates is situated between the first and second ferromagnetic layers and (ii) a second ferromagnetic plate of the pair of ferromagnetic plates is situated between the second and third ferromagnetic layers;
• and
• the pair of ferromagnetic plates and the first, second, and third ferromagnetic layers further cooperating to drive at least one contact that includes:
• a first contact member having a base with an exposed surface, a first metal layer on a top surface of the base;
• a liquid metal layer on a top surface of the first metal layer and extending above the exposed surface of the first contact member;
• and
• a second contact member having a contact surface, the second contact member positioned adjacent the first contact member in an open position and movable to a closed position in which the contact surface of the second contact member contacts and compresses the liquid metal layer and the first metal layer.