Imaging device and image generation method
AssigneeKioxia Corporation
InventorTakeshi Yamane
Life of this patent
Estimating the term…
Abstract
An imaging device includes an image processor configured to: i) determine that a detection intensity distribution indicating detection intensity with respect to position coordinates of a stage is a convolution of an image intensity distribution on an extension line of a linear pixel and a window function; (ii) calculate an image intensity distribution for each linear pixel by deconvolution from the detection intensity distribution; and (iii) generate an image of the subject by disposing the image intensity distribution calculated in all the linear pixels in an arrangement direction of the linear pixels.
Claims12
An imaging device comprising:
- a stage configured to place a subject;
- a detector including a plurality of linear pixels having linear light receiving surfaces extending in a first direction arranged in a second direction orthogonal to the first direction with equal intervals;
- an image formation optical member configured to form an image based on imaging light passing through the subject on a detection surface of the detector;
- and
- an image processor configured to reconstruct the image of the subject based on detection intensity of the imaging light,
- wherein the stage is scannable in a direction parallel to the first direction,
- the detector is configured to set a sampling interval equal to or less than half a time to scan a distance of a line length of the linear pixel by the stage, and outputs the detection intensity at each sampling interval, and
- the image processor is configured to:
- (i) determine that a detection intensity distribution indicating the detection intensity with respect to position coordinates of the stage is a convolution of an image intensity distribution on an extension line of the linear pixel and a window function;
- (ii) calculate the image intensity distribution for each linear pixel by deconvolution from the detection intensity distribution;
- and (iii) generate an image of the subject by disposing the image intensity distribution calculated in all the linear pixels in an arrangement direction of the linear pixels.
An image generation method, comprising:
- irradiating a subject placed on a stage with imaging light;
- outputting detection intensity of imaging light passing through the subject at each sampling interval to be equal to or less than half a time that a distance of a line length of the linear pixel is scanned in the stage by a detector, wherein the detector includes a plurality of linear pixels having linear light receiving surfaces extending in a first direction arranged in a second direction orthogonal to the first direction at equal intervals while scanning the subject at a predetermined speed in the first direction;
- determining that a detection intensity distribution indicating the detection intensity with respect to position coordinates of the stage is a convolution of an image intensity distribution on an extension line of the linear pixel and a window function;
- calculating the image intensity distribution for each linear pixel by deconvolution from the detection intensity distribution;
- and
- generating an image of the subject by disposing the image intensity distribution calculated in all the linear pixels in an arrangement direction of the linear pixels.
Dependencies are inferred from the claim text.