Semiconductor device with biofet and biometric sensors

A semiconductor device, comprising:

• a substrate;
• a biological field effect transistor (bioFET), comprising:
• a gate electrode disposed on a first side of the substrate,
• source and drain regions disposed in the substrate, and
• a channel region disposed between the source region and the drain region;
• and
• a biometric sensor comprising first and second piezoelectric layers disposed on a second side of the substrate.

A semiconductor device, comprising:

• a substrate;
• a gate electrode disposed on a first side of the substrate;
• source and drain regions disposed in the substrate;
• first and second piezoelectric regions disposed on a second side of the substrate;
• a high-k dielectric layer disposed on and between the first and second piezoelectric regions, wherein materials of the high-k dielectric layer and the first and second piezoelectric regions are different from each other;
• and
• a temperature sensing electrode disposed on the second side of the substrate.