Control apparatus, system, lithography apparatus, article manufacturing method, control method, and non-transitory storage medium

A system comprising:

• a controlled apparatus connected to a network, and
• a control apparatus configured to control the controlled apparatus, wherein
• the control apparatus includes:
• a generation unit configured to generate instruction data for controlling the controlled apparatus,
• a communication unit configured to transmit/receive, in every predetermined cycle, via the network, a data frame including one of the instruction data generated by the generation unit and response data from the controlled apparatus, and
• a processing unit configured to, after the control apparatus receives, from the controlled apparatus, a first data frame including response data that indicates an abnormality of a unit controlled by the controlled apparatus:
• (i) request, from the controlled apparatus, abnormality data indicating information concerning the abnormality of the unit controlled by the controlled apparatus,
• (ii) acquire the requested abnormality data from the controlled apparatus, the acquired abnormality data being divided and included in a plurality of data frames received by the communication unit and indicating the information concerning the abnormality of the unit indicated by the response data included in the first data frame, and
• (iii) output the acquired abnormality data.

A control method of controlling, by a control apparatus, a controlled apparatus connected to a network, comprising:

• generating instruction data for controlling the controlled apparatus;
• transmitting/receiving, in every predetermined cycle, via the network, a data frame including one of the generated instruction data response data from the controlled apparatus;
• receiving, from the controlled apparatus, a first data frame including response data that indicates an abnormality of a unit controlled by the controlled apparatus;
• requesting, from the controlled apparatus, abnormality data indicating information concerning the abnormality of the unit controlled by the controlled apparatus;
• acquiring the requested abnormality data from the controlled apparatus, the acquired abnormality data being divided and included in a plurality of data frames received from the controlled apparatus and indicating the information concerning the abnormality of the unit indicated by the response data included in the first data frame;
• and
• outputting the acquired abnormality data.