Phase analyzer, sample analyzer, and analysis method
AssigneeJEOL Ltd.
InventorsKouta Itoh, Atsuhiro Fujii, Yuka Otake
Life of this patent
Estimating the term…
Abstract
A phase analyzer includes a data acquisition unit that acquires spectrum imaging data in which a position on a sample is associated with a spectrum of a signal from the sample; a candidate determination unit that performs multivariate analysis on the spectrum imaging data to determine candidates for the number of phases; a phase analysis unit that creates, for each of the candidates, a phase map group including a number of phase maps corresponding to the number of phases; and a display control unit that causes a display unit to display, for each of the candidates, the phase map group.
Claims7
A phase analyzer comprising:
- a data acquisition unit configured to acquire spectrum imaging data in which a position on a sample is associated with a spectrum of a signal from the sample;
- a candidate determination unit configured to perform multivariate analysis on the spectrum imaging data to determine candidates for a number of phases;
- a phase analysis unit configured to create, for each of the candidates, a phase map group comprising a number of phase maps corresponding to the number of phases;
- and
- a display control unit configured to cause a display unit to display, for each of the candidates, the phase map group, wherein
- the candidate determination unit determines a priority of the number of phases based on results of the multivariate analysis, and
- the candidate determination unit determines the candidates based on the priority of the number of phases.
A phase analyzer comprising:
- a data acquisition unit configured to acquire spectrum imaging data in which a position on a sample is associated with a spectrum of a signal from the sample;
- a candidate determination unit configured to perform multivariate analysis on the spectrum imaging data to determine candidates for a number of phases;
- a phase analysis unit configured to create, for each of the candidates, a phase map group comprising a number of phase maps corresponding to the number of phases;
- and
- a display control unit configured to cause a display unit to display, for each of the candidates, the phase map group, wherein
- the candidate determination unit is configured to:
- perform cluster analysis on the spectrum imaging data and classifies the spectrum imaging data into a plurality of minimum unit clusters,
- determine a function indicating a relationship between the number of clusters and linkage criteria representing a degree of dissimilarity by using a hierarchical clustering method for the plurality of minimum unit clusters,
- determine priority of the number of clusters based on curvatures of the function, and
- determine the candidates based on the priority of the number of clusters.
An analysis method comprising:
- acquiring spectrum imaging data in which a position on a sample is associated with a spectrum of a signal from the sample;
- performing multivariate analysis on the spectrum imaging data to determine candidates for a number of phases by determining a priority of the number of phases based on results of the multivariate analysis and determining the candidates based on the priority of the number of phases;
- creating, for each of the candidates, a phase map group including a number of phase maps corresponding to the number of phases;
- and
- causing a display unit to display, for each of the candidates, the phase map group.
Dependencies are inferred from the claim text.