Reflective interferometer systems and methods thereof
AssigneeMunro Design & Technologies, LLC
InventorsJames F. Munro, Robert D. Niederriter
Life of this patent
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Abstract
An interferometer system for measuring the displacement of a location of a test surface includes a reflective beamsplitter having a through-hole through which light enters into and exits from a reference arm and having a second through-hole through which a portion of light from the measurement arm of the interferometer passes through the beamsplitter and is incident on a position sensing device (PSD). The output of the PSD is then used as an indicator of the amount and direction of tilt of the surface under test so that systemic errors of the interferometer induced by the tilt of the test surface can be determined and removed from the displacement measurement.
Claims30
An interferometer system comprising
- a fiber optic;
- a reference arm;
- and
- a beamsplitter comprising:
- an elliptical mirror positioned to focus light from the fiber optic onto a test surface and to focus light reflected from the test surface onto the fiber optic;
- and
- an aperture through which light from the fiber optic enters the reference arm.
A method for making an interferometer system comprising
- providing a fiber optic;
- providing a reference arm;
- and
- providing a beamsplitter comprising:
- positioning an elliptical mirror to focus light from the fiber optic onto a test surface and to focus light reflected from the test surface onto the fiber optic;
- and
- providing an aperture through which light from the fiber optic enters the reference arm.
Dependencies are inferred from the claim text.