Displacement control device for seismic events

A displacement control assembly comprising:

• a brake plate;
• a horizontal support plate movable respective to the brake plate in a displacement direction;
• and
• a damper secured to one of the horizontal support plate or the brake plate and frictionally engaging a track of the other of the horizontal support plate or the brake plate;
• wherein the track includes a central track portion having first and second edges on opposite sides of the central track portion, and first and second inclined track portions extending away from the central track portion and connecting with the respective first and opposite second edges of the central track portion, the first and second inclined track portions each being inclined with respect to the central track portion to increase frictional force between the damper and the track with increasing distance of the damper away from the central track portion.

A semiconductor manufacturing tool installation comprising:

• a semiconductor manufacturing tool;
• and
• a support platform supporting the semiconductor manufacturing tool, the support platform including displacement control assemblies for controlling displacement of the semiconductor manufacturing tool in respective X-and Y-directions, wherein each displacement control assembly includes:
• a brake plate;
• a support plate bearing at least a portion of the weight of the semiconductor manufacturing tool and movable respective to the brake plate;
• and
• a damper secured to one of the support plate or the brake plate and frictionally engaging a track of the other of the support plate or the brake plate;
• wherein the track includes a central track portion which is a planar surface and inclined track portions extending away from the central track portion on respective first and opposite second sides of the central track portion, the inclined track portions each being inclined with respect to the central track portion.