Cleaning apparatus for vacuum exhaust system

A cleaning apparatus for a vacuum exhaust system that exhausts gas, the cleaning apparatus comprising:

• a cold trap capable of causing deposits to be formed by cooling gas containing a sublimation component;
• at least one first vacuum pump disposed upstream of the cold trap;
• at least one first exhaust path connecting the first vacuum pump to the cold trap;
• at least one second vacuum pump disposed downstream of the cold trap;
• and
• at least one second exhaust path connecting the second vacuum pump to the cold trap, wherein
• at least a part of the first vacuum pump or the first exhaust path is configured to be heated to higher than or equal to a sublimation temperature of the sublimation component, and
• the cold trap is configured to be cooled to less than or equal to the sublimation temperature of the sublimation component,
• the cold trap includes:
• a casing having an inlet port and an outlet port,
• at least one disc-shaped component disposed in the casing,
• a cooling mechanism configured to cool the disc-shaped component,
• a rotating shaft disposed in the casing, and
• at least one scraping portion fixed to the rotating shaft, the at least one scraping portion configured to be rotatable along a plate surface of the disc-shaped component.