Pad surface regeneration and metal recovery

A method for using a functionalized chemical planarization pad in planarization processes, the method comprising:

• planarizing a substrate material with the functionalized chemical planarization pad and an abrasive-free planarization solution, the functionalized chemical planarization pad including a plurality of functional groups covalently bonded to a polyurethane material of the pad, the functional groups being configured to chemically react with the substrate material such that a portion of substrate material bonds to the functional groups;
• regenerating the pad by applying a regeneration solution configured to break bonds between the functional groups and substrate material bonded to the functional groups to form removed material, wherein regenerating the pad includes reacting the substrate material bonded to the functional groups with a stripping agent configured to break the bonds between the functional groups and the substrate material bonded to the functional groups;
• and
• complexing the removed material in a dissolved complexing agent to form dissolved material in an effluent phase,
• wherein the stripping agent and the dissolved complexing agent are different materials, and wherein the dissolved complexing agent is provided in the regeneration solution contemporaneously with the stripping agent.