Method for supplying or removing sliding process material to/from surface of object to be slid

A method for supplying or removing a sliding process material to or from a surface of an object to be slid using a sliding part including a plurality of sliding bodies each having a flat working surface, the method comprising

• regularly moving the sliding part in parallel with the working surfaces of the sliding bodies and in a direction different from a moving direction of the sliding bodies while regularly moving the sliding bodies in parallel with the working surfaces, wherein the flat working surface makes contact with the surface of the object to be slid, wherein:
• each sliding body has a sliding body rotation axis and is rotated about its sliding body rotation axis by a first driving mechanism,
• the sliding part has a sliding part rotation axis and is rotated about the sliding part rotation axis by a second driving mechanism, the rotation of the sliding bodies and the rotation of the sliding part result in orbital motion of the sliding bodies.