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US 12,465,935 B2Granted
Unit for storing liquid and apparatus for treating substrate
AssigneeSemes Co., Ltd.
InventorsMoon Soon Choi, Chae Young Lim, Do Gyeong Ha, Gu Yeol An
Life of this patent
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Abstract
The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.
Claims20
A liquid storage unit comprising:
- a tank housing defining a storing space therein;
- a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon;
- and
- a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and
- wherein a first guide surface is provided between the outlet and the inlet,
- wherein a part or all of the inlet at least partially overlaps the first guide surface when seen from above.
3 more elements
A liquid storage unit comprising:
- a tank housing defining a storing space therein;
- and
- a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon;
- a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon;
- and
- a first line connecting the liquid outlet pipe and the liquid inlet pipe, and
- wherein the outlet is positioned at a position higher than a position of the inlet.
4 more elements
A liquid storage unit comprising:
- a tank housing defining a storing space therein;
- a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon;
- and
- a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and
- wherein a first guide surface is provided between the outlet and the inlet, and
- the first guide surface is defined as a bottom surface defining the storing space.
3 more elements
Dependencies are inferred from the claim text.