Vertical cavity surface emitting laser element, vertical cavity surface emitting laser element array, vertical cavity surface emitting laser module, and method of producing vertical cavity surface emitting laser element

A vertical cavity surface emitting laser element array, comprising:

• a plurality of arranged vertical cavity surface emitting laser elements, wherein each of the plurality of arranged vertical cavity surface emitting laser elements includes:
• a first substrate that includes a first material and an active layer;
• a second substrate that includes a second material, wherein
• the second substrate is bonded to the first substrate,
• light having a specific wavelength is transmittable through the second material, and
• the second material is different from that of the first material;
• a first distributed Bragg reflector (DBR) layer on a side of the first substrate opposite to the second substrate,
• wherein the first DBR layer is configured to reflect the light having the specific wavelength;
• a second DBR layer on a side of the second substrate opposite to the first substrate,
• wherein the second DBR layer is configured to reflect the light having the specific wavelength;
• and
• a third substrate on the side of the first substrate opposite to the second substrate, wherein
• the first DBR layer is on a side of the third substrate opposite to the first substrate, and
• the third substrate includes a third material having a thermal conductivity higher than that of the first material.

A vertical cavity surface emitting laser module, comprising:

• a vertical cavity surface emitting laser element that includes:
• a first substrate that includes a first material and an active layer;
• a second substrate that includes a second material, wherein
• the second substrate is bonded to the first substrate,
• light having a specific wavelength is transmittable through the second material, and
• the second material is different from the first material;
• a first distributed Bragg reflector (DBR) layer on a side of the first substrate opposite to the second substrate,
• wherein the first DBR layer is configured to reflect the light having the specific wavelength;
• a second DBR layer on a side of the second substrate opposite to the first substrate, wherein
• the second DBR layer is configured to reflect the light having the specific wavelength, and
• the second substrate is a circuit substrate;
• and
• a third substrate on the side of the first substrate opposite to the second substrate, wherein
• the first DBR layer is on a side of the third substrate opposite to the first substrate, and
• the third substrate includes a third material having a thermal conductivity higher than that of the first material.

A method of producing a vertical cavity surface emitting laser element array, the method comprising:

• forming a first substrate that includes a first material and an active layer;
• forming a second substrate that includes a second material, wherein
• light having a specific wavelength is transmittable through the second material, and
• the second material is different from the first material;
• bonding the first substrate to the second substrate to form a structure in which the first substrate and the second substrate are located between a first distributed Bragg reflector (DBR) layer that reflects the light having the specific wavelength and a second DBR layer that reflects the light having the specific wavelength;
• and
• forming a third substrate on a side of the first substrate opposite to the second substrate, wherein
• the first DBR layer is on a side of the third substrate opposite to the first substrate, and
• the third substrate includes a third material having a thermal conductivity higher than that of the first material.