Robot hand, robot and fixing device

A robot hand configured to hold a substrate, comprising:

• a base body;
• a blade defining a holding position for holding the substrate and attached at a base part to the base body;
• and
• a differential screw having a center axis perpendicular to a principal surface of the substrate existing at the holding position and configured to attach the base part of the blade to the base body,
• the differential screw including:
• a first threaded part having a first pitch;
• a second threaded part having a second pitch different from the first pitch;
• and
• an intervening member coaxially having a third threaded part to be threadedly engaged with the first threaded part, and a fourth threaded part to be threadedly engaged with the second threaded part,
• wherein the first threaded part is provided to the base body, and the second threaded part is provided to the base part of the blade,
• one of the base body and the blade is a first internally-threaded member having a first internally-threaded part comprising the first threaded part or the second threaded part,
• a first slit is formed in the first internally-threaded member to intersect with the first internally-threaded part in a plane perpendicular to an axial direction of the first internally-threaded part, and
• the intervening member is a deformable member deformable in a radial direction.